Capacitive RF MEMS switch design and simulation. RF MEMS switches are the specific micromechanical switches that are designed to operate at RF to mmWave frequencies. MEMS switches usages some mechanical movement to achieve a closed or open circuit in the Radio Frequency transmission lines.
Also question is, what does MEMS mean?
Micro-Electro-Mechanical Systems, or MEMS, is a technology that in its most general form can be defined as miniaturized mechanical and electro-mechanical elements (i.e., devices and structures) that are made using the techniques of microfabrication. The term used to define MEMS varies in different parts of the world.
Secondly, how MEMS are manufactured?
MEMS are manufactured with the same process as semiconductor integrated circuits, meaning they are made by combining together extremely thin layers of engineering materials (metals and insulators in combination with silicon) and patterned with micron or sub-micron size features.
How does a MEMS sensor work?
MEMS sensors combine electrical and mechanical components into or on top of a single chip - i.e. they are electro-mechanical sensors. The extent of the diaphragm deformation is then converted to a representative electrical signal, which appears at the sensor output.
What does an RF switch do?
An RF switch or microwave switch is a device to route high frequency signals through transmission paths. Incorporating a switch into a switch matrix system enables you to route signals from multiple instruments to single or multiple DUTs.